The fused silica glass ring can help maintain a contamination-totally free natural environment, crucial for acquiring reliable wafer top quality and significant approach yields.
Common thoughts requested about items Does this product guidance customization? How does one ship the merchandise? What's the warranty with the item?
When compared to straightforward quartz rings, OP Quartz Rings offer greater opacity, far better thermal shielding, and decrease gentle transmission, encouraging to keep up steady furnace problems and lessen wafer contamination.
Customizable: We will develop quartz rings on your actual specifications for inner diameter, outer diameter, and thickness/top.
The Remarkable thermal uniformity of Semixlab’s precision-polished quartz makes certain consistent film thickness and exceptional surface area top quality through the wafer. The fabric’s optical transparency and infrared reflectivity may also be tailored to reinforce heating effectiveness and minimize temperature gradients within the deposition zone.
・Compared to silica wool and silica insulation, this content has high thermal resistance, exceptional sealing qualities and won't respond Along with the quartz tube.
This merchandise was made as being a higher temperature thermal insulation which include in diffusion furnace and CVD devices Utilized in semiconductor manufacturing procedures.
Functions as a protective element to stop various contaminations during the etching manufacturing approach, ensuring sealing and protection from the chamber. It is actually used in wafer manufacturing etching processes, that happen to be low-temperature procedures.
・This ring could be manufactured to match the shape of your quartz tube and silicon carbide tube loaded from the furnace.
In plasma etching (Dry Etch) processes, the quartz ring acts like a protective barrier from plasma erosion and ion bombardment, shielding the chamber’s metallic surfaces from contamination and particle era.
Potent chemical security: Resistant to most acids and corrosive chemicals besides hydrofluoric acid.
two µm). This mixture of purity and precision minimizes particle technology and supports steady procedure repeatability throughout high-volume semiconductor output strains. We look ahead to your further more inquiry.
※The low impurity variety makes quartz insulation ring for semiconductor furnace use of minimal impurity elements during the outer elements, inner filler and sewing thread. ・Thermal insulating rings have thermal resistance of 1200℃.
Selecting among OP and normal quartz insulation ring for semiconductor furnace quartz rings depends on system needs, furnace design, and the need for thermal uniformity and wafer security.